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Vacuum Probe Station VPX-10

  • 型番VPX-10
  • メーカーWiT
  • 状況調達可能
  • 保証1年
価格

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概要

Model VPX-10 is very elaborately designed all-purpose evacuating probe station which can measure device properties according to the variation of temperature (10K ~ 500K) in the vacuum beyond limits of the ambient system. Customers can choose the number of probe arms when the vacuum chamber is assembled onto a lab table from minimum 4 to maximum 6 probe arms. Furthermore, users can comparably measure device properties at the atmospheric pressure and in the high-degree (~10-6 torr) vacuum. Through innovative design of temperature conversion stage can control wide range of stage temperature; fine tuning of LN2 flowing though small tubular type of path, effective temperature transmission via pasted ceramic type chuck which also enhance the temperature transition time and the temperature resolution. Real-time high magnified micro-video system provides clear video information to a user for approaching the micro-tip to the micro-scaled sample electrodes exactly. Images can be zoomed in and out for easy sample loading and unloading. With equipped mass flow control system, internal environmental gas can be controlled easily (optional) as expanding the measuring variables for more various research application.

主要特長

  • All-general-purpose system
  • High-degree vacuum state
  • Atmospheric gas control
  • LN2, LHe circulated temperature variable stage

主要仕様

Sample
Sample size 2″ to 4″
Sample chuck Nickel-plated (sample fixed with bottom-evacuation)
Probing
Maximum probes 6pcs
Device movement 210mm(X), 210mm(Y)
X,Y,Z movement 25mm x 25mm x 25mm
Resolution 1µm
Base option Vacuum & magnet
Tip holder Triaxial & tube type
Sample chuck evacuation
Pumping speed 7L/min
Ultimate pressure 6.65 × 103 Pa
Ports BNC, Triaxial
Vacuum chamber footprint
Chamber footprint 300mm(118in) Diameter, 200mm(78.7 in) height
Position Plate footprint 800mm(315in) Width, 800mm(315 in) Depth
Ultimate pressure 1.0×10-7Torr
Gas Port 1/4in NPT with valve
Ports Vacuum, Gas, Vent
Vibration Isolation Table
Vibration Isolation Table footprint 900mm(354 in) width, 900mm(354 in) depth, 750mm(295 in) height
Auto Level Control ±0.1 mm,Repeatability
Natural Frequency 1.2 ~ 1.5Hz, Vertical, 1.5 ~ 2 Hz, Horizontal
Load Capacity 400kg ~ 2,000kg
Air Supply 5 ~ 7 kgf/cm2 Air
Hot-chuck & Controller
Heater footprint 300mm(118.1 in) width
Temperature Range 77K ~ 500K (LN2), 10K ~ 800K (He)
Temp rate: +30℃/min, Temp rate: -12℃/min,
Temp resolution: ±0.5℃
Resolution High Temp: ±0.5℃, Low Temp:±3℃
ChuckCoating Au Plated
Utility
1-phase voltage 100/120/220/240VAC (+5%, -10%), 50/60Hz
1-phase power 2kVA recommended
3-phase voltage Not required
3-phase power Not required
Cooling water Not required
Temperature changeable chuck
Heater footprint 300mm(118.1 in) width
Temperature 77K ~ 500K (LN2), 10K ~ 800K (He)
Temp rate: +130℃/min, Temp rate: -12℃/min,
Temp resolution: ±0.5℃
Power 200V DC, 150W
ChuckCoating Au Plated
Micro video scope
6.5x zoom lens 0.75x to 5x, 0.5x adapter, working distance 105mm 
Image sensor IMX236
Output signal USB 2.0, composite, HDMI
Pixel size 3.23.2µm x 3.2µm
Resolution Dynamic: 1920 x 1080 /
Static: 3264 x 1840

資料ㆍカタログ

About WIT

Probe System, Measurement System, Ceramic | WIT

We would like to extend our hearty welcome to WIT to all of you. WIT was established in 2015 and we moved into a new building which is found with clean and comfortable office, laboratory and assembling room in 2016. We always try to do our best for the customers to create the best products and provide for their wants. We keep developing the products with fresh and specialized ideas than to be content with present. WIT promise to be a company which puts the customers satisfaction the first priority. You can always make the best use of the resource of WIT, i.e., know-how by well-trained engineers and research related long experience of the staff. WIT hope you to get good results with the best product which is provided by WIT. Would you like with us? Please contact us!!!

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