概要

VPX-10DC model has the dual chamber structure, it is able to have maximum of space efficiency using a chamber of top and bottom structure in the limited space. The configuration of multi-chambers is alternative and dual- or multi-chamber economically share apparatus such as a pump, gas controller(MFC) and vacuum components. Specifications like temperature variable range or the degree of vacuum are identical to the standard vacuum probe station VPX-10. This idea of multi-chamber system can expand the research scope.

主要特長

Tabletop placed probe station
Vertical/lateral configuration
Multi-control factors environments
Cost effective dual chamber having 1-control center

主要仕様

Temperature changeable chuck
Heater footprint	300mm(118.1 in) width
Temperature	77K ~ 500K (LN2) 10K ~ 800K (He) Temp rate: +130℃/min Temp rate: -12℃/min Temp resolution: ±0.5℃
Power	200V DC, 150W
ChuckCoating	Au Plated

Probing
Maximum probes	6pcs
Device movement	210mm(X), 210mm(Y)
X,Y,Z movement	13mm x 13mm x 13mm
Resolution	1µm
Base option	Vacuum & magnet
Tip holder	Triaxial & tube type

資料ㆍカタログ

TITLE	DOWNLOADS
WIT Catalogue (english)	download

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Probe System, Measurement System, Ceramic | WIT

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